Overview of MEMS and Microsystems: MEMS and Microsystem, Typical MEMS and Microsystems Products, Evolution of Microfabrication, Microsystems and Microelectronics, Multidisciplinary Nature of Microsystems, Miniaturization. Applications and Markets.
Working Principles of Microsystems: Introduction, Microsensors, Microactuation, MEMS with Microactuators, Microaccelerometers, Microfluidics.
Engineering Science for Microsystems Design and Fabrication: Introduction, Molecular Theory of Matter and Inter-molecular Forces, Plasma Physics, Electrochemistry.
Engineering Mechanics for Microsystems Design: Introduction, Static Bending of Thin Plates, Mechanical Vibration, Thermomechanics, Fracture Mechanics, Thin Film Mechanics, Overview on Finite Element Stress Analysis.
Scaling Laws in Miniaturization: Introduction, Scaling in Geometry, Scaling in Rigid-Body Dynamics, Scaling in Electrostatic Forces, Scaling in Fluid Mechanics, Scaling in Heat Transfer.
Overview of Micromanufacturing: Introduction, Bulk Micromanufacturing, Surface Micromachining, The LIGA Process, Summary on Micromanufacturing.